검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Economical sampling algorithm using Fourier analysis for mapping wafer critical dimension variations Xu OY, Berglund CN, McCord MA, Pease RFW, Spence C, Liu HY Journal of Vacuum Science & Technology B, 16(6), 3655, 1998 |
| No. | Article |
|---|---|
| 1 |
Economical sampling algorithm using Fourier analysis for mapping wafer critical dimension variations Xu OY, Berglund CN, McCord MA, Pease RFW, Spence C, Liu HY Journal of Vacuum Science & Technology B, 16(6), 3655, 1998 |