검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of O-2(+) Energy, Flux, and Fluence on the Formation and Growth of Sputtering-Induced Ripple Topography on Silicon Vajo JJ, Doty RE, Cirlin EH Journal of Vacuum Science & Technology A, 14(5), 2709, 1996 |
| No. | Article |
|---|---|
| 1 |
Influence of O-2(+) Energy, Flux, and Fluence on the Formation and Growth of Sputtering-Induced Ripple Topography on Silicon Vajo JJ, Doty RE, Cirlin EH Journal of Vacuum Science & Technology A, 14(5), 2709, 1996 |