검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Analysis and modeling of low pressure CVD of silicon nitride from a silane-ammonia mixture - I. Experimental study and determination of a gaseous phase mechanism Yacoubi K, Azzaro-Pantel C, Scheid E, Couderc JP Journal of the Electrochemical Society, 146(8), 3009, 1999 |
| 2 |
Analysis and modeling of low pressure CVD of silicon nitride from a silane-ammonia mixture - II. Deposition modeling Yacoubi K, Azzaro-Pantel C, Couderc JP Journal of the Electrochemical Society, 146(8), 3018, 1999 |