검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Comparative study of charge trapping in high-dose Si and Ge-implanted Al/SiO2/Si structures Nazarov A, Skorupa W, Osiyuk IN, Tjagulskii IP, Lysenko VS, Yankov RA, Gebel T Journal of the Electrochemical Society, 152(2), F20, 2005 |
| 2 |
Advanced thermal processing of ultrashallow implanted junctions using flash lamp annealing Skorupa W, Gebel T, Yankov RA, Paul S, Lerch W, Downey DF, Arevalo EA Journal of the Electrochemical Society, 152(6), G436, 2005 |
| 3 |
(AlN)(x)(SiC)(1-x) buried layers implanted in 6H-SiC: a theoretical study of their optimized composition Masri P, Laridjani MR, Pezoldt J, Yankov RA, Skorupa W, Averous M Applied Surface Science, 184(1-4), 383, 2001 |