검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low-temperature formation of silicon nitride films using pulsed-plasma CVD under near atmospheric pressure Matsumoto M, Inayoshi Y, Suemitsu M, Miyamoto E, Yara T, Nakajima S, Uehara T, Toyoshima Y Applied Surface Science, 254(19), 6208, 2008 |
| 2 |
Low temperature growth of polycrystalline Si on polyethylene terephthalate (PET) films using pulsed-plasma CVD under near atmospheric pressure Matsumoto M, Inayoshi Y, Suemitsu M, Yara T, Nakajima S, Uehara T, Toyoshima Y Thin Solid Films, 516(19), 6673, 2008 |