화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Silicon-oxide-high-kappa-oxide-silicon memory using a high-kappa Y2O3 nanocrystal film for flash memory application
Pan TM, Yeh WW
Journal of Vacuum Science & Technology A, 27(4), 700, 2009
2 Polysilicon-oxide-nitride-oxide-silicon-type flash memory using an Y2O3 film as a charge trapping layer
Pan TM, Yeh WW
Electrochemical and Solid State Letters, 11(7), G37, 2008
3 Physical and electrical properties of lanthanum oxide dielectrics with Al and Al/TaN metal gates
Pan TM, Chen CL, Yeh WW, Lai WJ
Electrochemical and Solid State Letters, 10(3), H101, 2007