검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A Novel Planarization of Oxide-Filled Shallow-Trench Isolation Cheng JY, Lei TF, Chao TS, Yen DL, Lin CJ Journal of the Electrochemical Society, 144(1), 315, 1997 |
| No. | Article |
|---|---|
| 1 |
A Novel Planarization of Oxide-Filled Shallow-Trench Isolation Cheng JY, Lei TF, Chao TS, Yen DL, Lin CJ Journal of the Electrochemical Society, 144(1), 315, 1997 |