화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Impact of Surface Preparation on Ni(Pt) Silicide Oxidation
Huang JY, Yeo KL, Kumar A, Seet CS
Electrochemical and Solid State Letters, 14(1), II42, 2011
2 SIMS backside depth profiling of ultra shallow implants
Yeo KL, Wee ATS, See A, Liu R, Ng CM
Applied Surface Science, 203, 335, 2003
3 Investigation of boron penetration through decoupled plasma nitrided gate oxide using backside secondary ion mass spectrometry depth profiling
Yeo KL, Wee ATS, Liu R, Zhou FF, See A
Journal of Vacuum Science & Technology B, 21(1), 193, 2003