검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Impact of Pad-Wafer Contact Area in Chemical Mechanical Polishing Yeruva SB, Park CW, Rabinovich YI, Moudgil BM Journal of the Electrochemical Society, 156(10), D408, 2009 |
| 2 |
Interaction force measurements using atomic force microscopy for characterization and control of adhesion, dispersion and lubrication in particulate systems Esayanur MS, Yeruva SB, Rabinovich YI, Moudgil BM Journal of Adhesion Science and Technology, 19(8), 611, 2005 |