검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators Riekkinen T, Nurmela A, Molarius J, Pensala T, Kostamo P, Ylilammi M, van Dijken S Thin Solid Films, 517(24), 6588, 2009 |
| 2 |
Monolayer Thickness in Atomic Layer Deposition Ylilammi M Thin Solid Films, 279(1-2), 124, 1996 |
| 3 |
Mass-Transport in Atomic Layer Deposition Carrier Gas Reactors Ylilammi M Journal of the Electrochemical Society, 142(7), 2474, 1995 |
| 4 |
Metal Fluoride Thin-Films Prepared by Atomic Layer Deposition Ylilammi M, Rantaaho T Journal of the Electrochemical Society, 141(5), 1278, 1994 |