검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron-Cyclotron-Resonance Plasma Source for Metalorganic Chemical-Vapor-Deposition of Silicon-Oxide Films Popov OA, Shapoval SY, Yoder MD, Chumakov AA Journal of Vacuum Science & Technology A, 12(2), 300, 1994 |
| No. | Article |
|---|---|
| 1 |
Electron-Cyclotron-Resonance Plasma Source for Metalorganic Chemical-Vapor-Deposition of Silicon-Oxide Films Popov OA, Shapoval SY, Yoder MD, Chumakov AA Journal of Vacuum Science & Technology A, 12(2), 300, 1994 |