검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Growth of Si crystalline in SiOx films induced by millisecond rapid thermal annealing using thermal plasma jet Okada T, Higashi S, Kaku H, Yorimoto T, Murakami H, Miyazaki S Solid-State Electronics, 52(3), 377, 2008 |
| No. | Article |
|---|---|
| 1 |
Growth of Si crystalline in SiOx films induced by millisecond rapid thermal annealing using thermal plasma jet Okada T, Higashi S, Kaku H, Yorimoto T, Murakami H, Miyazaki S Solid-State Electronics, 52(3), 377, 2008 |