검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Microstructure and properties of ultrathin amorphous silicon nitride protective coating Yen BK, White RL, Waltman RJ, Dai Q, Miller DC, Kellock AJ, Marchon B, Kasai PH, Toney MF, York BR, Deng H, Xiao QF, Raman V Journal of Vacuum Science & Technology A, 21(6), 1895, 2003 |