검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Production of Nb thin film by ECR sheet plasma Shibata K, Ito H, Yugami N, Miyazaki T, Nishida Y Thin Solid Films, 386(2), 291, 2001 |
| No. | Article |
|---|---|
| 1 |
Production of Nb thin film by ECR sheet plasma Shibata K, Ito H, Yugami N, Miyazaki T, Nishida Y Thin Solid Films, 386(2), 291, 2001 |