검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Etching technique for ruthenium with a high etch rate and high selectivity using ozone gas Nakahara M, Tsunekawa S, Watanabe K, Arai T, Yunogami T, Kuroki K Journal of Vacuum Science & Technology B, 19(6), 2133, 2001 |
| 2 |
Anisotropic etching of RuO2 and Ru with high aspect ratio for gigabit dynamic random access memory Yunogami T, Nojiri K Journal of Vacuum Science & Technology B, 18(4), 1911, 2000 |
| 3 |
Development of Neutral-Beam-Assisted Etcher Yunogami T, Yokogawa K, Mizutani T Journal of Vacuum Science & Technology A, 13(3), 952, 1995 |