검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of thin Ta-Si-N-x layers of different nitrogen content using XPS, UPS and STM Zahn W, Hildebrand D, Menzel S, Oswald S, Heuer H Applied Surface Science, 252(1), 89, 2005 |
| 2 |
Mechanical stress in ALD-Al2O3 films Krautheim G, Hecht T, Jakschik S, Schroder U, Zahn W Applied Surface Science, 252(1), 200, 2005 |