검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of silicon oxynitride at room temperature by Inductively Coupled Plasma-CVD Zambom LDS, Verdonck P Thin Solid Films, 515(2), 596, 2006 |
| No. | Article |
|---|---|
| 1 |
Deposition of silicon oxynitride at room temperature by Inductively Coupled Plasma-CVD Zambom LDS, Verdonck P Thin Solid Films, 515(2), 596, 2006 |