검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering Mansano RD, Massi M, Zambom LS, Verdonck P, Nogueira PM, Maciel HS, Otani C Thin Solid Films, 373(1-2), 243, 2000 |
| 2 |
LPCVD deposition of silicon nitride assisted by high density plasmas Zambom LS, Mansano RD, Furlan R, Verdonck P Thin Solid Films, 343-344, 299, 1999 |