검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Advanced chemical vapor deposition silicon carbide barrier technology for ultralow permeability applications Zambov L, Weidner K, Shamamian V, Camilletti R, Pernisz U, Loboda M, Cerny G, Gidley D, Peng HG, Vallery R Journal of Vacuum Science & Technology A, 24(5), 1706, 2006 |
| 2 |
Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films Kulisch W, Popov C, Zambov L, Bulir J, Delplancke-Ogletree MP, Lancok J, Jelinek M Thin Solid Films, 377-378, 148, 2000 |
| 3 |
Design of injection feed multiwafer low-pressure chemical vapor deposition reactors Zambov L, Popov C, Ivanov B Journal of the Electrochemical Society, 145(7), 2494, 1998 |