검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Kinetic-Study of Low-Energy Argon Ion-Enhanced Plasma-Etching of Polysilicon with Atomic/Molecular Chlorine Chang JP, Arnold JC, Zau GC, Shin HS, Sawin HH Journal of Vacuum Science & Technology A, 15(4), 1853, 1997 |
| No. | Article |
|---|---|
| 1 |
Kinetic-Study of Low-Energy Argon Ion-Enhanced Plasma-Etching of Polysilicon with Atomic/Molecular Chlorine Chang JP, Arnold JC, Zau GC, Shin HS, Sawin HH Journal of Vacuum Science & Technology A, 15(4), 1853, 1997 |