검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Electrostatically Actuated Micromechanical Switches Majumder S, Mcgruer NE, Zavracky PM Journal of Vacuum Science & Technology A, 15(3), 1246, 1997 |
| 2 |
Surface Characteristics of (100)Silicon Anisotropically Etched in Aqueous KOH Vu QB, Stricker DA, Zavracky PM Journal of the Electrochemical Society, 143(4), 1372, 1996 |
| 3 |
Patterned Eutectic Bonding with Al/Ge Thin-Films for Microelectromechanical Systems Vu B, Zavracky PM Journal of Vacuum Science & Technology B, 14(4), 2588, 1996 |
| 4 |
Fabrication of Vertical Sidewalls by Anisotropic Etching of Silicon (100) Wafers Zavracky PM, Earles T, Pokrovskiy NL, Green JA, Burns BE Journal of the Electrochemical Society, 141(11), 3182, 1994 |