검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of stress evolution of boron nitride films prepared by ion assisted deposition Zeitler M, Sienz S, Rauschenbach B Journal of Vacuum Science & Technology A, 17(2), 597, 1999 |
| No. | Article |
|---|---|
| 1 |
Study of stress evolution of boron nitride films prepared by ion assisted deposition Zeitler M, Sienz S, Rauschenbach B Journal of Vacuum Science & Technology A, 17(2), 597, 1999 |