| 1 |
One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma
Huang TY, Jin CG, Yu J, Yang Y, Zhuge LJ, Wu XM, Sha ZD
Plasma Chemistry and Plasma Processing, 37(4), 1237, 2017 |
| 2 |
Structural and optical properties of Er-doped TiO2 thin films prepared by dual-frequency magnetron co-sputtering
Yang JQ, Hu YB, Jin CG, Zhuge LJ, Wu XM
Thin Solid Films, 637, 9, 2017 |
| 3 |
Electrical properties improvement of high-k HfO2 films by combination of C4F8 dual-frequency capacitively coupled plasmas treatment with thermal annealing
Zhang HY, Ye C, Jin CG, Wu MZ, Wang YY, Zhang Z, Huang TY, Yang Y, He HJ, Zhuge LJ, Wu XM
Applied Surface Science, 311, 117, 2014 |
| 4 |
Mechanical properties and bonding structure of boron carbon nitride films synthesized by dual ion beam sputtering
Zhou F, Wang QZ, Yue B, Wu XM, Zhuge LJ, Cheng XN
Materials Chemistry and Physics, 138(1), 215, 2013 |
| 5 |
Ferromagnetic and photoluminescence properties of Cu-doped ZnO nanorods by radio frequency magnetron sputtering
Jin CG, Yu T, Yang Y, Wu ZF, Zhuge LJ, Wu XM, Feng ZC
Materials Chemistry and Physics, 139(2-3), 506, 2013 |
| 6 |
Annealing temperature dependence of interface characteristic and energy-band alignment in ultra-thin HfLaO/Si and HfLaO/SiGe interfaces
Yang Y, Jin CG, Wu ZF, Wu XM, Zhuge LJ, Yu T
Materials Chemistry and Physics, 142(2-3), 479, 2013 |
| 7 |
The structure and electrical properties of HfTaON high-k films prepared by DIBSD
Yu T, Jin CG, Yang XM, Dong YJ, Zhang HY, Zhuge LJ, Wu XM, Wu ZF
Applied Surface Science, 258(7), 2953, 2012 |
| 8 |
Effect of low energy ion bombardment on structure and photoluminescence characterization of Al-doped ZnO thin films
Jin CG, Yu T, Wu ZF, Wu XM, Zhuge LJ
Thin Solid Films, 524, 39, 2012 |
| 9 |
Study on changes in the structure of HfSiO and HfSiON dielectrics with different annealing temperature by photoelectron spectroscopy
Yang XM, Yu T, Wu XM, Zhuge LJ, Ge SB, He JJ
Applied Surface Science, 257(22), 9277, 2011 |
| 10 |
Effect of Mn doping on the nanostructure and optical properties of ZnO films synthesized by magnetron sputtering
Wu ZF, Wu XM, Zhuge LJ, Hong B, Yang XM, Yu T, He JJ, Chen Q
Applied Surface Science, 256(7), 2259, 2010 |
