검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Surface passivation of InGaP/GaAs HBT using silicon-nitride film deposited by ECR-CVD plasma Manera LT, Zoccal LB, Diniz JA, Tatsch PJ, Doi I Applied Surface Science, 254(19), 6063, 2008 |
| 2 |
Efficacy of ECR-CVD silicon nitride passivation in InGaP/GaAs HBTs Zoccal LB, Diniz JA, Doi I, Swart JW, Daltrini AM, Moshkalyov SA Journal of Vacuum Science & Technology B, 24(4), 1762, 2006 |