검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Electron-Beam Microcolumns for Lithography and Related Applications Chang TH, Thomson MG, Kratschmer E, Kim HS, Yu ML, Lee KY, Rishton SA, Hussey BW, Zolgharnain S Journal of Vacuum Science & Technology B, 14(6), 3774, 1996 |
| 2 |
Experimental Evaluation of a 20X20 mm Footprint Microcolumn Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Zolgharnain S, Hussey BW, Chang TH Journal of Vacuum Science & Technology B, 14(6), 3792, 1996 |
| 3 |
Characterization of a GaAs Metal-Semiconductor-Metal Low-Energy-Electron Detector Zolgharnain S, Lee KY, Rishton SA, Kisker D, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2556, 1995 |
| 4 |
Micromachining Applications of a High-Resolution Ultrathick Photoresist Lee KY, Labianca N, Rishton SA, Zolgharnain S, Gelorme JD, Shaw J, Chang TH Journal of Vacuum Science & Technology B, 13(6), 3012, 1995 |