| 1 |
Atmospheric-Pressure Plasma Reduction of Metal Cation-Containing Polymer Films to Produce Electrically Conductive Nanocomposites by an Electrodiffusion Mechanism
Ghosh S, Ostrowski E, Yang R, Debnath D, Feng PXL, Zorman CA, Sankaran RM
Plasma Chemistry and Plasma Processing, 36(1), 295, 2016 |
| 2 |
Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications
Fu XA, Dunning JL, Mehregany M, Zorman CA
Journal of the Electrochemical Society, 158(6), H675, 2011 |
| 3 |
Polycrystalline Diamond-on-Polymer Electrode Arrays Fabricated Using a Polymer-Based Transfer Process
Hess AE, Sabens DM, Martin HB, Zorman CA
Electrochemical and Solid State Letters, 13(11), J129, 2010 |
| 4 |
Amorphous SiC as a structural layer in microbridge-based RF MEMS switches for use in software-defined radio
Parro RJ, Scardelletti MC, Varaljay NC, Zimmerman S, Zorman CA
Solid-State Electronics, 52(10), 1647, 2008 |
| 5 |
Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition
Fu XA, Dunning JL, Zorman CA, Mehregany M
Thin Solid Films, 492(1-2), 195, 2005 |
| 6 |
Surface roughness control of 3C-SiC films during the epitaxial growth process
Fu XA, Zorman CA, Mehregany M
Journal of the Electrochemical Society, 151(12), G910, 2004 |
| 7 |
Development of a high-throughput LPCVD process for depositing low stress poly-SiC
Fu XA, Dunning J, Zorman CA, Mehregany M
Materials Science Forum, 457-460, 305, 2004 |
| 8 |
Advanced processing techniques for silicon carbide MEMS and NEMS
Zorman CA, Mehregany M
Materials Science Forum, 457-460, 1451, 2004 |
| 9 |
Young's modulus and residual stress of polycrystalline 3C-SiC films grown by LPCVD and measured by the load-deflection technique
Fu XA, Dunning J, Zorman CA, Mehregany M
Materials Science Forum, 457-460, 1519, 2004 |
| 10 |
Characterization of polycrystalline SiC thin films for MEMS applications using surface micromachined devices
Dunning J, Fu XA, Rajgopal S, Mehregany M, Zorman CA
Materials Science Forum, 457-460, 1523, 2004 |
