| 1 |
Influence of Zr alloying on the mechanical properties, thermal stability and oxidation resistance of Cr-Al-N coatings
Li WZ, Chen QZ, Polcar T, Serra R, Cavaleiro A
Applied Surface Science, 317, 269, 2014 |
| 2 |
Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron sputtering
Lin YW, Huang JH, Yu GP
Thin Solid Films, 518(24), 7308, 2010 |
| 3 |
Mechanical properties and phase structure of (TiAlZr)N films deposited by multi arc ion plating
Zhang J, Guo WY, Zhang Y, Guo Q, Wang C, Zhang LP
Thin Solid Films, 517(17), 4830, 2009 |
| 4 |
Characterization of Ti-Zr-N films deposited by cathodic vacuum arc with different substrate bias
Niu EW, Li L, Lv H, Chen H, Li XZ, Yang XZ, Yang SZ
Applied Surface Science, 254(13), 3909, 2008 |
| 5 |
Effect of substrate bias voltages on the diffusion barrier properties of Zr-N films in Cu metallization
Wang Y, Zhao CH, Song ZX, Cao F, Yang DW
Applied Surface Science, 253(22), 8858, 2007 |
| 6 |
Evaluation of the thermal stability of reactively sputtered (Ti, Zr)N-x nano-thin films as diffusion barriers between Cu and silicon
Kuo YL, Lee C, Lin JC, Yen YW, Lee WH
Thin Solid Films, 484(1-2), 265, 2005 |
