검색결과 : 2건
No. | Article |
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1 |
Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering Sah RE, Kirste L, Baeumler M, Hiesinger P, Cimalla V, Lebedev V, Baumann H, Zschau HE Journal of Vacuum Science & Technology A, 28(3), 394, 2010 |
2 |
The quantitative role of surface doped fluorine for the improvement of oxidation resistance of TiAl in air Zschau HE, Schutze M, Baumann H, Bethge K Materials Science Forum, 461-464, 505, 2004 |