화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering
Sah RE, Kirste L, Baeumler M, Hiesinger P, Cimalla V, Lebedev V, Baumann H, Zschau HE
Journal of Vacuum Science & Technology A, 28(3), 394, 2010
2 The quantitative role of surface doped fluorine for the improvement of oxidation resistance of TiAl in air
Zschau HE, Schutze M, Baumann H, Bethge K
Materials Science Forum, 461-464, 505, 2004