검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of pressure and substrate temperature on the deposition of nano-structured silicon-carbon-nitride superhard coatings by magnetron sputtering Mishra SK, Shekhar C, Rupa PKP, Pathak LC Thin Solid Films, 515(11), 4738, 2007 |