검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers Chen JQ, Louis E, Harmsen R, Tsarfati T, Wormeester H, van Kampen M, van Schaik W, van de Kruijs R, Bijkerk F Applied Surface Science, 258(1), 7, 2011 |
| 2 |
Fabrication of highly aligned nano-hole/trench structures by atomic force microscopy tip-induced oxidation and atomic hydrogen cleaning Kim JS, Kawabe M, Koguchi N Journal of Crystal Growth, 262(1-4), 265, 2004 |