화학공학소재연구정보센터
검색결과 : 10건
No. Article
1 Depth resolution and preferential sputtering in depth profiling of delta layers
Hofmann S, Lian SY, Han YS, Liu Y, Wang JY
Applied Surface Science, 455, 1045, 2018
2 Correlation of depth resolution and preferential sputtering in depth profiles of thin layers by Secondary Ion Mass Spectrometry (SIMS)
Hofmann S, Lian SY, Han YS, Deng QR, Wang JY
Thin Solid Films, 662, 165, 2018
3 Synthesis and characterization of Ti/Al reactive multilayer films with various molar ratios
Sen S, Lake M, Wilden J, Schaaf P
Thin Solid Films, 631, 99, 2017
4 Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures
Chakraborty BR, Halder SK, Maurya KK, Srivastava AK, Toutam VK, Dalai MK, Sehgal G, Singh S
Thin Solid Films, 520(20), 6409, 2012
5 Structure characterization of Pd/Co/Pd tri-layer films epitaxially grown on MgO single-crystal substrates
Tobari K, Ohtake M, Nagano K, Futamoto M
Thin Solid Films, 519(23), 8384, 2011
6 Atomistic modeling of femtosecond laser-induced melting and atomic mixing in Au film - Cu substrate system
Thomas DA, Lin ZB, Zhigilei LV, Gurevich EL, Kittel S, Hergenroder R
Applied Surface Science, 255(24), 9605, 2009
7 Accurate depth profiling for ultra-shallow implants using backside-SIMS
Hongo C, Tomita M, Takenaka M
Applied Surface Science, 231-2, 673, 2004
8 Low energy dual beam depth profiling: influence of sputter and analysis beam parameters on profile performance using TOF-Sims
Grehl T, Mollers R, Niehuis E
Applied Surface Science, 203, 277, 2003
9 SIMS study of depth profiles of delta-doped boron/silicon alternating layers by low-energy ion beams
Hayashi S, Takano A, Takenaka H, Homma Y
Applied Surface Science, 203, 298, 2003
10 Profile reconstruction in sputter depth profiling
Hofmann S
Thin Solid Films, 398-399, 336, 2001