화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 SIMS analysis of HfSiO(N) thin films
Miwa S, Kusanagi S, Kobayashi H
Applied Surface Science, 252(19), 7176, 2006
2 Accurate depth profiling for ultra-shallow implants using backside-SIMS
Hongo C, Tomita M, Takenaka M
Applied Surface Science, 231-2, 673, 2004
3 Copper-indium-gallium-diselenide/molybdenum layers analyzed by corrected SIMS depth profiles
Bilger G, Grabitz PO, Strohm A
Applied Surface Science, 231-2, 804, 2004
4 Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS
Hongo C, Tomita A, Takenaka M, Murakoshi A
Applied Surface Science, 203, 264, 2003
5 SIMS backside depth profiling of ultra shallow implants
Yeo KL, Wee ATS, See A, Liu R, Ng CM
Applied Surface Science, 203, 335, 2003