검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical mechanical polishing of BTO thin film for vertical sidewall patterning of high-density memory capacitor Kim NH, Ko PJ, Seo YJ, Lee WS Thin Solid Films, 504(1-2), 261, 2006 |
| No. | Article |
|---|---|
| 1 |
Chemical mechanical polishing of BTO thin film for vertical sidewall patterning of high-density memory capacitor Kim NH, Ko PJ, Seo YJ, Lee WS Thin Solid Films, 504(1-2), 261, 2006 |