화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Fabrication of AlGaInAs and GaInAsP buried heterostructure lasers by in situ etching
Gessner R, Dobbinson A, Miler A, Rieger J, Veuhoff E
Journal of Crystal Growth, 248, 426, 2003
2 Impact of neutron irradiation on optical performance of InGaAsP laser diodes
Ohyama H, Simoen E, Claeys C, Takami Y, Sunaga H, Yoneoka M, Nakabayashi M, Kobayashi K, Kudou T
Thin Solid Films, 364(1-2), 259, 2000
3 Electrical Evaluation of InP Surface Damage Caused by Reactive Ion Etching with a Mixture of Methane (CH4) or Ethane (C2H6) and Hydrogen (H-2)
Yamamoto N, Kishi K, Matsumoto S, Kadota Y, Iga R, Okamoto H, Mawatari H
Journal of Vacuum Science & Technology B, 15(1), 103, 1997
4 Fabrication of InGaAs/InP Avalanche Photodiodes by Reactive Ion Etching Using CH4/H-2 Gases
Park CY, Yoo JB, Park C, Hyun KS, Oh DK, Lee YH, Lee C, Park HM
Journal of Vacuum Science & Technology B, 13(3), 974, 1995