검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Evaluation of the Electrical Asymmetry Effect by spectroscopic measurements of capacitively coupled discharges and silicon thin film depositions Schungel E, Hofmann R, Mohr S, Schulze J, Ropcke J, Czarnetzki U Thin Solid Films, 574, 60, 2015 |
| 2 |
Time evolution of electrode voltage distribution in large-area capacitively coupled plasmas Matsukuma M, Hamaguchi S Thin Solid Films, 515(12), 5188, 2007 |