검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
SiNx/a-SiCx : H passivation layers for p- and n-type crystalline silicon wafers Coscia U, Ambrosone G, Rava P, Rivolo P, Ferrazza F, Serenelli L, De Iuliis S, Tucci M Thin Solid Films, 516(7), 1569, 2008 |
| 2 |
Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition Tharigen T, Lorenz A Applied Surface Science, 179(1-4), 156, 2001 |