검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Properties of hetero-structured SiCX films deposited by hot-wire CVD using SiH3CH3 as carbon source Itoh T, Kawasaki T, Takai Y, Yoshida N, Nonomura S Thin Solid Films, 516(5), 641, 2008 |
| No. | Article |
|---|---|
| 1 |
Properties of hetero-structured SiCX films deposited by hot-wire CVD using SiH3CH3 as carbon source Itoh T, Kawasaki T, Takai Y, Yoshida N, Nonomura S Thin Solid Films, 516(5), 641, 2008 |