검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Oxygen influence on sputtered high rate ZnO:Al films from dual rotatable ceramic targets Zhu H, Hupkes J, Bunte E, Huang SM Applied Surface Science, 256(14), 4601, 2010 |
| 2 |
The d.c. magnetron sputtering behavior of TiO2-x targets with added Fe2O3 or Nd2O3 Eufinger K, Tomaszewski H, Depla D, Poelman H, Poelman D, De Gryse R Thin Solid Films, 515(2), 683, 2006 |