검색결과 : 1건
No. | Article |
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1 |
Influences of bias voltage on the crystallographic orientation of AlN thin films prepared by long-distance magnetron sputtering Chu AK, Chao CH, Lee FZ, Huang HL Thin Solid Films, 429(1-2), 1, 2003 |
No. | Article |
---|---|
1 |
Influences of bias voltage on the crystallographic orientation of AlN thin films prepared by long-distance magnetron sputtering Chu AK, Chao CH, Lee FZ, Huang HL Thin Solid Films, 429(1-2), 1, 2003 |