화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Probing into the asymmetric nature of electromigration performance of submicron interconnect via structure
Roy A, Tan CM
Thin Solid Films, 515(7-8), 3867, 2007
2 Copper electromigration modeling including barrier layer effect
Wu W, Yuan JS
Solid-State Electronics, 45(12), 2011, 2001
3 Applicability of ALE TiN films as Cu/Si diffusion barriers
Kim DJ, Jung YB, Lee MB, Lee YH, Lee JH, Lee JH
Thin Solid Films, 372(1-2), 276, 2000