검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
On the development of Finite-Difference Time-Domain for modeling the spectroscopic ellipsometry response of 1D periodic structures Foo YS, Cheung KT, To CH, Zapien JA Thin Solid Films, 571, 356, 2014 |
| 2 |
Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring Huang HT, Terry FL Thin Solid Films, 455-56, 828, 2004 |