검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Integrated aluminum nitride piezoelectric microelectromechanical system for radio front ends Piazza G Journal of Vacuum Science & Technology A, 27(4), 776, 2009 |
| 2 |
Electrothermal actuation of silicon carbide ring resonators Mastropaolo E, Cheung R, Henry A, Janzen E Journal of Vacuum Science & Technology B, 27(6), 3109, 2009 |