검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography Tsarfati T, de Kruijs RWEV, Zoethout E, Louis E, Bijkerk F Thin Solid Films, 518(5), 1365, 2009 |
| 2 |
Improved temperature stability of Mo/Si multilayers by carbide based diffusion barriers through implantation of low energy CHx+ ions Alink LGAM, de Kruijs RWEV, Louis E, Bijkerk F, Verhoeven J Thin Solid Films, 510(1-2), 26, 2006 |
| 3 |
Interface roughness in Mo/Si multilayers Nedelcu I, de Kruijs RWEV, Yakshin AE, Tichelaar F, Zoethout E, Louis E, Enkisch H, Muellender S, Bijkerk F Thin Solid Films, 515(2), 434, 2006 |