검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of dopant concentration and type of substrate on the local organization of low-pressure chemical vapour deposition in situ boron doped silicon films from silane and boron trichloride Caussat B, Scheid E, de Mauduit B, Berjoan R Thin Solid Films, 446(2), 218, 2004 |
| 2 |
Improved characterization of polycrystalline silicon film, by resonant Raman scattering Paillard V, Puech P, Temple-Boyer P, Caussat B, Scheid E, Couderc JP, de Mauduit B Thin Solid Films, 337(1-2), 93, 1999 |
| 3 |
Influence of substrate nature on the microstructure of LPCVD silicon films Caussat B, Couderc JP, Scheid E, Bourgerette C, de Mauduit B Journal of Materials Science Letters, 17(22), 1899, 1998 |