검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies Petrovic ZL, Raspopovic ZM, Stojanovic VD, Jovanovic JV, Malovic G, Makabe T, de Urquijo J Applied Surface Science, 253(16), 6619, 2007 |
| 2 |
Electron transport, ionization, and attachment coefficients in C2F4 and C2F4/Ar mixtures Goyette AN, de Urquijo J, Wang YC, Christophorou LG, Olthoff JK Journal of Chemical Physics, 114(20), 8932, 2001 |