검색결과 : 2건
No. | Article |
---|---|
1 |
Growth and defect reduction of bulk SiC crystals Ohtani N, Fujimoto T, Katsuno M, Aigo T, Yashiro H Materials Science Forum, 389-3, 29, 2002 |
2 |
Observation of planar defects in 2-inch SiC wafer Tanaka H, Nishiguchi T, Sasaki M, Nishino S Materials Science Forum, 389-3, 79, 2002 |