| 1 |
High-rate Deposition of Polycrystalline Diamond Film Using Time-series Exposure of Modulated/Non-modulated Induction Thermal Plasmas at Different Flow Rates of Carbon Source Gas
Hata K, Tanaka Y, Kano N, Nakano Y, Uesugi Y, Ishijima T
Plasma Chemistry and Plasma Processing, 41(3), 757, 2021 |
| 2 |
sp3's experience using hot filament CVD reactors to grow diamond for an expanding set of applications
Herlinger J
Thin Solid Films, 501(1-2), 65, 2006 |
| 3 |
Method of porous diamond deposition on porous silicon
Baranauskas V, Peterlevitz AC, Chang DC, Durrant SF
Applied Surface Science, 185(1-2), 108, 2001 |
| 4 |
Influence of the gas phase on doping in diamond chemical vapor deposition
Dandy DS
Thin Solid Films, 381(1), 1, 2001 |
| 5 |
Tunable diode laser diagnostic studies of H-2-Ar-O-2 microwave plasmas containing methane or methanol
Ropcke J, Mechold L, Kaning M, Fan WY, Davies PB
Plasma Chemistry and Plasma Processing, 19(3), 395, 1999 |
| 6 |
C-2 column densities in H-2/Ar/CH4 microwave plasmas
Goyette AN, Matsuda Y, Anderson LW, Lawler JE
Journal of Vacuum Science & Technology A, 16(1), 337, 1998 |
| 7 |
Carbon based thin film cathodes for field emission displays
Weber A, Hoffmann U, Klages CP
Journal of Vacuum Science & Technology A, 16(3), 919, 1998 |
| 8 |
Distribution of species within an ethylene electron cyclotron resonance-microwave plasma
Webb SF, Gaddy GA, Blumenthal R
Journal of Vacuum Science & Technology A, 16(4), 2148, 1998 |
| 9 |
Diamond deposition procedure from microwave plasmas using a mixture of CO2-CH4 as carbon source
Itoh K, Matsumoto O
Thin Solid Films, 316(1-2), 18, 1998 |
| 10 |
Positive bias effects on the growth of diamond at pressures below 100 mTorr
Teii K, Yoshida T
Thin Solid Films, 316(1-2), 24, 1998 |
