검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Model of boron incorporation into silicon epitaxial film in a B2H6-SiHCl3-H-2 system Habuka H, Otsuka T, Qu WF, Shimada M, Okuyama K Journal of Crystal Growth, 222(1-2), 183, 2001 |
| No. | Article |
|---|---|
| 1 |
Model of boron incorporation into silicon epitaxial film in a B2H6-SiHCl3-H-2 system Habuka H, Otsuka T, Qu WF, Shimada M, Okuyama K Journal of Crystal Growth, 222(1-2), 183, 2001 |