검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Highly reliable gate oxidation using catalytic water vapor generator (WVG) for MOS device fabrication Ohkawa T, Nakamura O, Aharoni H, Ohmi T Thin Solid Films, 405(1-2), 290, 2002 |
| No. | Article |
|---|---|
| 1 |
Highly reliable gate oxidation using catalytic water vapor generator (WVG) for MOS device fabrication Ohkawa T, Nakamura O, Aharoni H, Ohmi T Thin Solid Films, 405(1-2), 290, 2002 |