검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparison of the growth characteristics of SiC on Si between low-pressure CVD and triode plasma CVD Yasui K, Hashiba M, Narita Y, Akahane T Materials Science Forum, 389-3, 367, 2002 |
| No. | Article |
|---|---|
| 1 |
Comparison of the growth characteristics of SiC on Si between low-pressure CVD and triode plasma CVD Yasui K, Hashiba M, Narita Y, Akahane T Materials Science Forum, 389-3, 367, 2002 |